|
Model |
OWUCS-S V2
OWUCS-S (VR type) |
OWUCS-S V2 (D type)
OWUCS-S (DR type) |
OWUCS-S V2 (C type)
OWUCS-S (CR type) |
OWUCS-S V2 (K type)
OWUCS-S (KR type) |
OWUCS-S V2 (M type)
OWUCS-S (MR type) |
|
Dimensions (mm) |
700 x 1100 x 1910 |
850
x 1150 x 1910
900 x 1200 x 2060 |
950 x 1250 x 2060 |
1000 x 1400 x 2060 |
900
x 1700 x 2060 |
|
Weight (kg) |
650 |
830
|
1050
|
1300 |
1400
|
|
Feed gas |
Oxygen,
¡Ö99.9%,
particle free |
|
Oxygen flow rate (l/min) |
8 -
18 |
12 - 20 |
12
- 32 |
24 - 36 |
32 - 45 |
|
UPW flow rate (l/min) |
40 |
50 |
100 |
50 - 140 |
16
- 140 |
|
Ozonated water concentration (ppm) |
30 |
30 |
25 |
50
- 25 |
80 - 25 |
|
Power consumption (kW) |
7 |
11 |
16 |
22 |
25 |
|
Power supply |
220 V ¡Ó 10%, 50/60 Hz,
single phase |
220 V ¡Ó 10%, 50/60 Hz, 3
phases |
|
Cooling method |
Water cooled |
|
Certified |
CE
and SEMI S2/S8 |
|
Ambient conditions |
a. Ambient temperature: 5 - 25¢J
b. Humidity: Max. 80% (Not exceed 50% at 40¢J) |
