Specification

 

H-200

H-300

H-400

H-500

 Structure

 Silent discharge upon the surfaces of two quartz tubes

 Dimensions (mm)

600 x 1000 x 2015

700 x 1000 x 2015

700 x 1100 x 2065

800 x 1200 x 2065

 Weight (kg)

500

550

650

980

 Ozone production

 (cooling water temperature: 10)

200 g/h @ 250 g/Nm3, 14 l/min

290 g/h @ 260 g/Nm3, 20 l/min

130 g/h @ 290 g/Nm3, 8 l/min

230 g/h @ 280 g/Nm3, 15 l/min

140 g/h @ 310 g/Nm3, 8 l/min

320 g/h @ 290 g/Nm3, 20 l/min

 Ozone production

 (cooling water temperature: 18)

110 g/h @ 260 g/Nm3, 8 l/min

180 g/h @ 250 g/Nm3, 13 l/min

120 g/h @ 270 g/Nm3, 8 l/min

220 g/h @ 260 g/Nm3, 15 l/min

120 g/h @ 270 g/Nm3, 8 l/min

290 g/h @ 260 g/Nm3, 20 l/min

 Power consumption (kW)

5

7

10.5

14

 Feed gas

 Oxygen (99.9%, particle free)

 Cooling method

 Water cooled

 Power supply

 220 - 240 V, 50/60 Hz, 3~

 Interface

 PLC and POD

 Certified

 CE and SEMI S2/S8

 Ambient conditions

 a. Ambient temperature: 5 - 40℃ (recommend: 25℃)

 b. Humidity: Max 80% (Not exceed 50% at 40℃)

 

 

PI Diagram

 

 

  

 

 

 

Performance

 

         

 

 

 

Dimensional Drawing

       

 

 

 

 


[Application Information]